脉冲偏压电源具有如下显著特点: 1.恒压精度高，恒定效果优秀占空比、偏压连续平稳可调可有效降低沉积温度，更好的轰击效果。 2.可通过保证膜层获得细小均匀的晶粒而使膜层的综合性能得以保证，包括膜层的内应力、膜与基层的结合力等指标。 3.能够通过改变参数对薄膜的内应力进行控制，从而达到沉积厚膜等目的。 4.可有效改变膜层的形核、生长机制，促使膜层由岛状生长向层状生长的转变。
The pulsed bias power supply has the following distinctive features:
1. It boasts high constant voltage accuracy and an excellent constant effect. With an adjustable, continuous, and stable duty cycle and bias, it can effectively reduce deposition temperatures, leading to enhanced sputtering results.
2. It ensures the comprehensive performance of the film layer by producing finely and uniformly crystallized grains. This includes factors such as the film's internal stress and the adhesive strength between the film and the base layer.
3. It can control the internal stress of the thin film by modifying its parameters, thus achieving objectives like depositing thick films.
4. It effectively alters the nucleation and growth mechanisms of the film layer, facilitating the shift from island-like growth to layer-like growth in the film.